Entegris

Entegris is a Massachusetts-based advanced materials and process solutions company headquartered in Billerica that provides materials, equipment components, and integrated solutions for semiconductor manufacturing and related high-technology research applications. The company's materials portfolio includes ultra-high-purity chemicals, photoresist ancillary materials, chemical mechanical planarization (CMP) slurries and pads, and specialty gases critical to advanced chip fabrication. For university semiconductor research groups and national laboratory cleanrooms running research-grade fab processes, Entegris supplies the same purity-grade process chemicals, gas delivery components, and contamination control equipment used by leading chip manufacturers. Their ATMI subsidiary provides sub-atmospheric pressure (low-pressure) specialty gas delivery systems (SDS and VAC cylinders) that safely store and deliver toxic and pyrophoric process gases including silane, arsine, and phosphine used in chemical vapor deposition (CVD) and ion implantation doping processes. Entegris's Poco Graphite and Silicon Carbide product lines provide high-purity structural components for thermal processing equipment in research furnaces and commercial epitaxy reactors. Their filtration and purification equipment, including point-of-use filters and liquid phase purification systems, maintains the ultra-high-purity standards required for advanced materials deposition research. Entegris materials science expertise, combined with their contamination modeling and process consulting capabilities, makes them a collaborative research partner for groups developing next-generation semiconductor processes and new materials platforms.